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Transmission electron microscopy (TEM) has become an indispensable analytical instrument in the fields of materials and semiconductors. It is an electron optical instrument that uses a high-energy electron beam as an illumination source and focuses electrons (i.e., transmitted electrons) passing through a sample (approximately 10-150 nm thick) through electromagnetic lenses to form an image. By combining multiple TEM techniques, information on the morphology, crystal structure, and chemical composition of a sample can be obtained simultaneously. TEM resolution can reach 0.12 nm, while STEM resolution can reach 0.16 nm.
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